ULTRA-FLAT CERAMIC VACUUM CHUCKS

  

Round type : Size 6", 8", 12"

Square Type : PCB, LCD

Universal Type : Order made

ULTRA-FLAT CERAMIC VACUUM CHUCKS 

Solutions Developed Specifically for Wafer Handling

Our ultra-flat ceramic vacuum wafer chucks improve yield management for semiconductor wafer processing. Low-surface-contact configurations minimize risk of back-side particles negatively affecting wafer geometry for precision applications. We offer:

• Ultra-flat capabilities


• Mirror polish


• Exceptionally lightweight


• High stiffness


• Low thermal expansion


• Large size capability – 300 mm and beyond


• Extreme wear resistance

High-Purity Materials Expertise
From powder production and basic forming to precision finishing and measurement, we produce high-quality, top-performance components. You'll find our materials:

• Reduce the effect of particulate contamination


• Offer ultra-clean purity


• Minimize wafer contact


• Resist corrosion in aggressive chemical cleaning

Typical applications include:

• Lithography


• Inspection


• Wafer cleaning


• Non-vacuum process chambe

semiXicon
www.chuck-table.com
wilson.wu@aol.com

Vacuum Chuck for laser microfabrication

Thin Film Vacuum Chuck

semiXicon porous ceramic vacuum chucks are available for a wild array of shapes and sizes for thin film substrates and other flat fragile materials, the chuck’s superb flat surface of porous ceramic distributes the vacuum force equally to mitigate any potential deflection.

The chucks are of different flatness and parallelism depends upon customer’s applications, in most of the cases we are talking about several microns on the entire surface.

The frames to hold the porous ceramic insert can be alumina, stainless steel, or ceramic, we have specially developed the assembly technology which distinguish our chucks to brave harsh working environment with high temperature and humidity.

Some standard designs are

Square:            2”,4”,6”,8”,9”,12”,20”

Round:             2”,4”,5”,6”,8”,9”,12”

Rectangle:       2”*4”,4”*6”,6”*12,12”*20

http://www.chuck-table.com

sales@semixicon.com

Applicaitons of porous Chuck for micro photonics machining

Applicaitons of porous Chuck for micro photonics machining

• Optomechanical and optoelectronic components
• MEMS
• Micro-optical systems
• Manufacturing technology
• System development
• System integration
• Sensors, measurement and testing technology
• Optical analysis and sensors
• Manufacture of scientific instruments Imaging, and much more... 

We are now using porous ceramic, porous titanium,porous stainless steel, porous SiC,porous AlN etc for different applications ,please ask for us for a free design guaranteed!

www.chuck-table.com